Micro - Electro - Mechanical - Systems ( Mems )
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چکیده
منابع مشابه
Fractional Order Control of Micro Electro-Mechanical Systems
This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...
متن کاملFinite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS)
The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program. Index terms Micro Electromechanical Systems (MEMS), Finite elements (FE), Coupled analysis, Reduced order modeling (ROM)
متن کاملFractional Order Control of Micro Electro-Mechanical Systems
This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...
متن کاملMicro-Electro-Mechanical Systems (MEMS) for WDM Optical-Crossconnect Networks
MEMS (Micro-electro-mechanical systems) have shown promise for optical crossconnects in WDM networks. We will describe various MEMS optical-switching technologies, their successes in implementing important optical-networking functionalities, and future perspectives.
متن کاملSimulation and Modeling of a High Sensitivity Micro-electro-mechanical Systems Capacitive Pressure Sensor with Small Size and Clamped Square Diaphragm
This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...
متن کاملTriangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program
The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.
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